Contactprofilometrie

Merk

Bruker DektakXT Stylus profiler
Scan Length Range
55 mm of 200 mm met scan-stitching mogelijkheid
Verticale resolutie
4 Å (@ 6.55 µm range)
Maximale monsterafmetingen
200x200x50 mm
Uitvoer
Tweedimensionale oppervlakteprofielmetingen; optioneel driedimensionale meting/analyse

Oppervlakteprofilers worden veelvuldig gebruikt voor het meten van dunnefilmdiktes, oppervlakteruwheid en vorm in toepassingen variërend van educatief onderzoek tot procescontrole in de halfgeleiderindustrie.
The tip of a stylus gently moves over the surface of a flat surface in one line, leading to a two-dimensional surface profile. When multiple lines next to each other are combined a three-dimensional plot can be derived and analyzed.

With the DektakXt we at PTG Eindhoven measure the thin film thickness, stress, surface roughness and form. If you would like to receive more information please feel free to contact us.